The experimental and theoretical data on energy distributions of reflected hydrogen atoms are compared with computer simulations based on BCA Monte Carlo code. It is shown that analytical theories fail to describe the dependence of energy spectra parameters on the angle of incidence for small angle scattering of the beam at the energy about few tens of keV. The computer simulations reasonably agree with experimental data. The restriction in computation of the maximum value of scattering angle in each collision results in good agreement of energy spectra of reflected particles with an analytical model.
Nuclear Instruments and Methods in Physics Research B 212 (2003) 270–273